SEM Enables Sub-Nanometer 3D Surface Imaging

The high performance of the XHR systems derives from the integration of new electron optics, proprietary electron gun technology, a high stability platform with fully configurable analytical chamber, and a highly accurate five-axis piezo-ceramic stage that readily accommodates large samples or multiple smaller samples.

The systems can provide sub-nanometer resolution over a wide range of beam energies, from less than 1 kV to 30kV. FEI claims that this will enable manufacturers to see critical details about complex 3D structures in 32-nm nodes and below with unprecedented clarity and contrast.

The range currently comprises two models: the Magellan 400 and the Magellan 400L. "The Magellan XHR SEM is the most significant electron optics innovation since FEI introduced the Titan family three years ago,” said Dr. Rob Fastenau, FEI's executive vice president, marketing and technology. "Magellan is the only family of instruments to make sub-nanometer resolution accessible in a practical sense to non-experts and without restriction on samples--constraints that have previously limited the utility and acceptance of other systems.”


Related Links:
FEI